BS ISO 16531:2020 pdf free.Surface chemical analysis一Depth profiling一Methods for ion beam alignment and the associated measurement of current or current density for depth profiling in AES and XPS.
BS ISO 16531 This document specifies methods for the alignment of the ion beam to ensure good depth resolution in sputter depth profiling and optimal cleaning of surfaces when using inert gas ions in Auger electron spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS). These methods are of two types: one involves a Faraday cup to measure the ion current; the other involves imaging methods. The Faraday cup method also specifies the measurements of current density and current distributions in ion beams.The methods are applicable for ion guns with beams with a spot size less than or equal to 1 mm in
diameter. The methods do not include depth resolution optimization.The following documents are referred to in the text in such a way that some or all of their content constitutes requirements of this document. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies.ISO 18115-1, Surface chemical analysis一Vocabulary 一Part 1: General terms and terms used in spectroscopy.This document is applicable to the focusable ion gun for sputtering with inert gases that is usually supplied with most AES and XPS instruments or available from after-market suppliers. The beam size or raster area of the ion beam shall be larger than and uniform over the analysis area. Six alternative
methods of ion beam alignment are described that require the equipment to have provision for the measurement of the ion current or the detection of excited secondary signals or to have an optical microscope aligned at the analytical point. Depending on the equipment available, measurements of increasing sophistication may be made. The methods for measuring the ion beam current involve measurement by a circular-aperture Faraday cup, an elliptical-aperture Faraday cup or a co-axial electrode cup. The methods involving the excited secondary signals are categorized by ion/electroninduced secondary electrons or emitted photons that are detected with a secondary electron detector,an optical microscope or a phosphor screen.BS ISO 16531 pdf download.